Guided-mode and
Leaky-mode Resonance

Nanophotonics DeviceĀ Group
University of Texas at Arlington
Professor Robert Magnusson

Facilities



Kurt J. Lesker Lab 18 Thin-Film Deposition System



Automatic Nanolithography System



Oxford PlasmaLab80+ Reactive Ion Etcher



Processing Area



Characterization Laboratory



Park Systems XE-70 Atomic Force Microscope



Woollam VASE Ellipsometer



JEOL JSM 7600F Scanning Electron Microscope



 Spectroscopy Laboratory

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