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Facilities
Kurt J. Lesker Lab 18 Thin-Film Deposition System
Automatic Nanolithography System
Oxford PlasmaLab80+ Reactive Ion Etcher
Processing Area
Characterization Area
Park Systems XE-70 Atomic Force Microscope
Woollam VASE Ellipsometer
JEOL JSM 7600F Scanning Electron Microscope
Spectroscopy Laboratory